MTL - The Facilities
Integrated Circuits Laboratory
Class 10 - 2800 sq.ft. (6")
1.25 micron CMOS baseline process
Technology Research Laboratory
Class 100 - 2200 sq.ft. (6")
Flexible Process Environment
Exploratory Materials Laboratory
Class 1000 - 2000 sq.ft.
Thin Film Process Facility
IC Design Laboratory
Foundry IC Processes
Microsystems Technology Laboratories - MIT